A rilru a buai em em a, a rilru a hah em em bawk a. Hollow Rotary Semiconductor Table

Hollow Rotary Semiconductor Table chu eng nge ni?

Hollow rotary semiconductor table hi ultra-precision rotary positioning platform a ni a, central through-bore a awm a, cleanroom semiconductor siamna atana wafer handling, inspection leh processing equipment atana engineer bik a ni. Hollow center hian vacuum line, electrical wiring, emaw optical sensor cable te chu rotation axis kal tlangin a phalsak a, chu chuan external cable routing awm lovin contamination emaw wear-related debris emaw a thlen thei a, thianghlim, low-particle integration a siam thei a ni.

Ruangam

Table hian low-particulate, direct-drive emaw precision reduction stage (a tam zawkah chuan torque motor emaw harmonic-driven) chu worktable surface rit lo, low-outgassing hniam-outgassing hnuaiah a integrate a, chu chu high-precision cross-roller bearings hmanga thlawp a ni a, hei hian runout leh vibration tlem ber a siam a ni. Central bore hi drive leh table chhungah concentrically-in a kal a, vacuum chucking line emaw wafer sensor cable emaw chu external routing awm lovin a kal tlang thei a ni. Sub-arcsecond resolution nei encoder te hi closed-loop positioning feedback atan an inzawm khawm tlangpui.

Thil thlan dan tur ngaihtuah tur

Thil pawimawh tak takte chu bore diameter, positioning dikna leh repeatability (sub-micron/arcsecond level), cleanroom classification compatibility, particle generation rate, material leh lubricants outgassing characteristics, torsional stiffness, permissible load, leh settling time te a ni. Vibration damping leh thermal stability hi a pawimawh hle a, a chhan chu thermal drift emaw micro-vibration emaw hian wafer alignment dikna a tichhe thei a ni.

Dilna hrang hrang

Hollow rotary semiconductor table hi wafer prealigners, inspection leh metrology system, die bonding equipment, leh lithography stage positioning-ah te hman a ni a, chutah chuan ultra-precise rotational alignment combined with clean pass-through routing chu process integrity atan a pawimawh hle.

Installation ngaihtuah turte

Installation hi controlled cleanroom environment-ah tih a ngai a, chu chu bawlhhlawh a nih loh nan. Bore kaltlanga vacuum leh electrical line kaltlangin cable flexing atanga particle siam chhuah loh nan strain relief him tak a mamawh a ni. Mounting surface te chu cross pattern-ah chiang taka level leh torqued a ni tur a ni a, encoder calibration, vibration level, leh particle-shedding te chu production hman hmain post-installation hnuah verified tur a ni.

Hetah hian He page ah hian Hollow Rotary Semiconductor Table TMN130, 130 series kan rawn tarlang dawn a ni.

data sheet, production pictures,videos of test te chu a hnuaia mi ang hian i hmu ang:
Tin, Project dang en duh tan emaw Youtube hmanga kan video gallery tlawh theih a ni bawk:A rilru a hah lutuk chuan a rilru a buai em em a

FAQ:

1. Hollow rotary table-a hollow aperture awmte hi engzat nge common size?

Common aperture specifications: Mainstream hollow rotating platform-a hollow aperture hi 10mm atanga 600mm inkar a ni a, model bik 28mm, 33mm, 62mm, 100mm, 150mm, leh aperture lian zawk model te chu 600mm aia sang a ni

2. Hollow aperture lian tham tak hian hollow rotary table hnathawh danah eng nge nghawng a neih?

Aperture hian performance a nghawng dan: Aperture a lian poh leh platform rigidity a chak lo zawk. Aperture lian lutuk hian wall thickness tling lo leh stress inang lo a thlen thei a, chu chuan load-bearing capacity leh bending leh torsional performance a tihtlem a, operational accuracy leh stability a nghawng thei a ni. Design laiin aperture leh wall thickness ratio kha khauh takin control rawh.

3. Hollow structure chhunga bang chhunga material chu eng nge ni a, wear-resistant a ni em?

Inner wall material leh wear resistance: Inner wall material hi platform body nen a inmil a, aluminium alloy, cast iron, alloy steel, etc. hman tlangpui a ni a, inner wall hian a tlangpuiin high-frequency friction direct-in a phur lo va, mahse cable emaw ventilation pipe emaw thread a ngai a nih chuan surface hardening, anodizing leh treatment dang hmangin wear resistance leh corrosion tihchangtlun theih a ni dodalna a ni.

4. Hollow structure hian threading, tubing, ventilation function te a support em?

Functional support: Hollow structure hian threading, piping, leh ventilation te chu a support kim vek a ni. Cable, air pipe, optical fiber, coolant pipe, leh laser beam te hian hollow holes te hi an paltlang thei vek a, rotational motion laiin pipeline intanglement buaina chu tha takin a chinfel sak thei a ni.

5. Aperture lian tak tak hollow rotary table-te structural strength hi engtin nge kan tih theih ang?

Aperture lian tak tak structure chakna tur ruahmanna: 1 High-strength alloy steel emaw cast iron materials hmang la, 2 Rigidity tihpun nan high-precision cross roller bearing hmang la, 3 Aperture leh wall thickness ratio kha khauh takin control la, 3 Stress atan reinforcement bar layout siam that, 5 Assembly process standardize la, phurh chhuah laiin overloading leh deviation pumpelh rawh